FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding

S. Orain, J.-C. Barbé, X. Federspiel, P. Legallo, H. Jaouen. FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding. Microelectronics Reliability, 47(2-3):295-301, 2007. [doi]

Abstract

Abstract is missing.