Onur Ozdemir, Tangla D. Kongnyuy, Nga P. Pham, Roelof Jansen, Mathias Prost, Joost Brouckaert, Philippe Hélin. Advancements in LPCVD SiN Waveguides: Achieving 3 dB/m Propagation Loss on 200 mm Wafers. In Optical Fiber Communications Conference and Exhibition, OFC 2025, San Francisco, CA, USA, March 30 - April 3, 2025. pages 1-3, IEEE, 2025. [doi]
Abstract is missing.