High-performance stacked TiO2-ZrO2 and Si-doped ZrO2 metal-insulator-metal capacitors

Revathy Padmanabhan, Navakanta Bhat, Yuichiro Morozumi, S. Mohan, Sanjeev Kaushal. High-performance stacked TiO2-ZrO2 and Si-doped ZrO2 metal-insulator-metal capacitors. In 2014 IEEE International Conference on IC Design & Technology, ICICDT 2014, Austin, TX, USA, May 28-30, 2014. pages 1-4, IEEE, 2014. [doi]

Abstract

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