James Palmer, G. W. Zhang, J. R. Weber, Cheyun Lin, C. Perini, R. Kasim. Intrinsic Reliability of BEOL interlayer dielectric. In IEEE International Reliability Physics Symposium, IRPS 2021, Monterey, CA, USA, March 21-25, 2021. pages 1-2, IEEE, 2021. [doi]
Abstract is missing.