A Non-Invasive Characterization Method for MEMS Based Devices

Abbas Panahi, Ebrahim Ghafar-Zadeh, Sebastian Magierowski, Mohammad Hossein Sabour. A Non-Invasive Characterization Method for MEMS Based Devices. In IEEE 61st International Midwest Symposium on Circuits and Systems, MWSCAS 2018, Windsor, ON, Canada, August 5-8, 2018. pages 1094-1097, IEEE, 2018. [doi]

Authors

Abbas Panahi

This author has not been identified. Look up 'Abbas Panahi' in Google

Ebrahim Ghafar-Zadeh

This author has not been identified. Look up 'Ebrahim Ghafar-Zadeh' in Google

Sebastian Magierowski

This author has not been identified. Look up 'Sebastian Magierowski' in Google

Mohammad Hossein Sabour

This author has not been identified. Look up 'Mohammad Hossein Sabour' in Google