An Efficient Rule-Based OPC Approach Using a DRC Tool for 0.18mum ASIC

Ji-Soong Park, Chul-Hong Park, Sang-Uhk Rhie, Yoo-Hyon Kim, Moon-Hyun Yoo, Jeong-Taek Kong, Hyung-Woo Kim, Sun-Il Yoo. An Efficient Rule-Based OPC Approach Using a DRC Tool for 0.18mum ASIC. In 1st International Symposium on Quality of Electronic Design (ISQED 2000), 20-22 March 2000, San Jose, CA, USA. pages 81-86, IEEE Computer Society, 2000. [doi]

Abstract

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