Liu Peng, Wenzhong Lou, Ximing Dai, Yufei Lu. Verification and test system technology for CMOS-MEMS switches. In 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015. pages 585-588, IEEE, 2015. [doi]
Abstract is missing.