Benxian Peng, Ting Yu, Fengqi Yu, Yuchun Feng. A compact force sensor with low temperature drift design using a standard CMOS process. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 806-809, IEEE, 2010. [doi]
Abstract is missing.