Yao Peng, Jinyu Zhang, Yan Wang, Zhiping Yu. Gradient-Based Source and Mask Optimization in Optical Lithography. IEEE Transactions on Image Processing, 20(10):2856-2864, 2011. [doi]
@article{PengZWY11,
title = {Gradient-Based Source and Mask Optimization in Optical Lithography},
author = {Yao Peng and Jinyu Zhang and Yan Wang and Zhiping Yu},
year = {2011},
doi = {10.1109/TIP.2011.2131668},
url = {http://dx.doi.org/10.1109/TIP.2011.2131668},
researchr = {https://researchr.org/publication/PengZWY11},
cites = {0},
citedby = {0},
journal = {IEEE Transactions on Image Processing},
volume = {20},
number = {10},
pages = {2856-2864},
}