On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers

J. Pétry, Wilfried Vandervorst, L. Pantisano, Robin Degraeve. On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers. Microelectronics Reliability, 45(5-6):815-818, 2005. [doi]

Abstract

Abstract is missing.