Travel range extension of a MEMS electrostatic microactuator

Damrongrit Piyabongkarn, Yu Sun 0001, Rajesh Rajamani, A. Serdar Sezen, Bradley J. Nelson. Travel range extension of a MEMS electrostatic microactuator. IEEE Trans. Contr. Sys. Techn., 13(1):138-145, 2005. [doi]

Abstract

Abstract is missing.