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Local current fluctuations before and after breakdown of thin SiO::2:: films observed with conductive atomic force microscope

M. Porti, X. Blasco, M. Nafría, X. Aymerich, Alexander Olbrich, Bernd Ebersberger. Local current fluctuations before and after breakdown of thin SiO::2:: films observed with conductive atomic force microscope. Microelectronics Reliability, 41(7):1041-1044, 2001. [doi]

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M. Porti

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X. Blasco

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M. Nafría

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X. Aymerich

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Alexander Olbrich

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Bernd Ebersberger

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