Highly Sensitive Sputtered ZnO: Ga Thin Films Integrated by a Simple Stencil Mask Process on Microsensor Platforms for Sub-ppm Acetaldehyde Detection

Lionel Presmanes, Yohann Thimont, Audrey Chapelle, Frédéric Blanc, Chabane Talhi, Corine Bonningue, Antoine Barnabé, Philippe Ménini, Philippe Tailhades. Highly Sensitive Sputtered ZnO: Ga Thin Films Integrated by a Simple Stencil Mask Process on Microsensor Platforms for Sub-ppm Acetaldehyde Detection. Sensors, 17(5):1055, 2017. [doi]

Abstract

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