A MEMS Fiber-Optic Fabry-Perot Vibration Sensor for High-Temperature Applications

Jiang Qian, Pinggang Jia, Hua Liu, Qianyu Ren, Jia Liu 0006, Li Qin, Jijun Xiong. A MEMS Fiber-Optic Fabry-Perot Vibration Sensor for High-Temperature Applications. IEEE Access, 10:42908-42915, 2022. [doi]

Abstract

Abstract is missing.