Design and Implementation of Micromirror Drive Control System For MEMS Based NIR Spectrometer

Pengyu Qiao, Dan Niu, Jie Wang, Xiaojun Wang, Xisong Chen, Xiangyu Wang 0003. Design and Implementation of Micromirror Drive Control System For MEMS Based NIR Spectrometer. In Xiandong Ma, editor, 24th International Conference on Automation and Computing, ICAC 2018, Newcastle upon Tyne, United Kingdom, September 6-7, 2018. pages 1-5, IEEE, 2018. [doi]

Abstract

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