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Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation

Yan Qiao, Naiqi Wu, FaJun Yang, MengChu Zhou, Qinghua Zhu. Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 48(4):622-636, 2018. [doi]

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