Robust Scheduling of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Disturbance - researchr publication

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Yan Qiao, Naiqi Wu, FaJun Yang, MengChu Zhou, Qinghua Zhu, Ting Qu. Robust Scheduling of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Disturbance. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 49(6):1228-1240, 2019. [doi]

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