Zhenni Qin, Wenyuan Chen, Feng Cui, Qijun Xiao, Weiping Zhang. System-level simulation of a micromachined electrostatically suspended gyroscope. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 658-661, IEEE, 2010. [doi]
Abstract is missing.