Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits

Niels Quack, Hamed Sattari, Alain Y. Takabayashi, Yu Zhang, Pierre Edinger, Carlos Errando-Herranz, Kristinn B. Gylfason, Xiaojing Wang, Frank Niklaus, Moises A. Jezzini, How Yuan Hwang, Peter O'Brien, Marco A. G. Porcel, Cristina Lerma Arce, Saurav Kumar, Banafsheh Abasahl, Peter Verheyen, Wim Bogaerts. Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits. In Optical Fiber Communications Conference and Exhibition, OFC 2019, San Diego, CA, USA, March 3-7, 2019. pages 1-3, IEEE, 2019. [doi]

Authors

Niels Quack

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Hamed Sattari

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Alain Y. Takabayashi

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Yu Zhang

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Pierre Edinger

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Carlos Errando-Herranz

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Kristinn B. Gylfason

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Xiaojing Wang

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Frank Niklaus

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Moises A. Jezzini

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How Yuan Hwang

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Peter O'Brien

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Marco A. G. Porcel

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Cristina Lerma Arce

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Saurav Kumar

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Banafsheh Abasahl

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Peter Verheyen

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Wim Bogaerts

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