Novel low temperature 3D wafer stacking technology for high density device integration

Ionut Radu, Gweltaz Gaudin, W. van den Daele, F. Letertre, C. Mazure, Léa Di Cioccio, T. Lacave, F. Mazen, P. Scheiblin, Thomas Signamarcheix, Sorin Cristoloveanu. Novel low temperature 3D wafer stacking technology for high density device integration. In Proceedings of the European Solid-State Device Research Conference, ESSDERC 2013, Bucharest, Romania, September 16-20, 2013. pages 151-154, IEEE, 2013. [doi]

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