Spectroscopy of SILC trap locations and spatial correlation study of percolation path in the high-κ and interfacial layer

Nagarajan Raghavan, Michel Bosman, Kin Leong Pey. Spectroscopy of SILC trap locations and spatial correlation study of percolation path in the high-κ and interfacial layer. In IEEE International Reliability Physics Symposium, IRPS 2015, Monterey, CA, USA, April 19-23, 2015. pages 5, IEEE, 2015. [doi]

Abstract

Abstract is missing.