Pulsed laser annealing: A scalable and practical technology for monolithic 3D IC - researchr publication authors

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Bipin Rajendran, Albert K. Henning, Brian Cronquist, Zvi Or-Bach. Pulsed laser annealing: A scalable and practical technology for monolithic 3D IC. In 2013 IEEE International 3D Systems Integration Conference (3DIC), San Francisco, CA, USA, October 2-4, 2013. pages 1-5, IEEE, 2013. [doi]

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