Bipin Rajendran, Albert K. Henning, Brian Cronquist, Zvi Or-Bach. Pulsed laser annealing: A scalable and practical technology for monolithic 3D IC. In 2013 IEEE International 3D Systems Integration Conference (3DIC), San Francisco, CA, USA, October 2-4, 2013. pages 1-5, IEEE, 2013. [doi]
@inproceedings{RajendranHCO13,
title = {Pulsed laser annealing: A scalable and practical technology for monolithic 3D IC},
author = {Bipin Rajendran and Albert K. Henning and Brian Cronquist and Zvi Or-Bach},
year = {2013},
doi = {10.1109/3DIC.2013.6702386},
url = {http://dx.doi.org/10.1109/3DIC.2013.6702386},
researchr = {https://researchr.org/publication/RajendranHCO13},
cites = {0},
citedby = {0},
pages = {1-5},
booktitle = {2013 IEEE International 3D Systems Integration Conference (3DIC), San Francisco, CA, USA, October 2-4, 2013},
publisher = {IEEE},
}