José A. Ramírez-Hernández, Heshan Li, Emmanuel Fernandez, Charles McLean, Swee Leong. A framework for standard modular simulation in semiconductor wafer fabrication systems. In Proceedings of the 37th Winter Simulation Conference, Orlando, FL, USA, December 4-7, 2005. pages 2162-2171, ACM, 2005. [doi]
Abstract is missing.