A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure

Sen Ren, Weizheng Yuan, Dayong Qiao, Jinjun Deng, Xiaodong Sun. A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure. Sensors, 13(12):17006-17024, 2013. [doi]

Abstract

Abstract is missing.