Performance and Reliability of Technology Qualified 34 Mb Split-Gate eFLASH Macro in 28 nm HKMG

Ralf Richter, Stefan Dünkel, Bert Müller, Frank Mauersberger, Sven Wittek, Sven Beyer, Jana Böhme, Uwe Ritter, Violetta Sessi, Zhen Xu, Maximilian Drescher, Jinho Kim, Parviz Ghazavi, Yuri Tkachev, Latt Tee, Zonglin Li, Mandana Tadayoni, Fan Luo, Nhan Do, Serguei Jourba, Catherine Decobert, Gilles Festes, Bruno Villard, Thibaut Pate-Cazal. Performance and Reliability of Technology Qualified 34 Mb Split-Gate eFLASH Macro in 28 nm HKMG. In IEEE International Memory Workshop, IMW 2024, Seoul, Republic of Korea, May 12-15, 2024. pages 1-4, IEEE, 2024. [doi]

Abstract

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