Limitations to Estimating Yield Based on In-Line Defect Measurements

Stuart L. Riley. Limitations to Estimating Yield Based on In-Line Defect Measurements. In 14th International Symposium on Defect and Fault-Tolerance in VLSI Systems (DFT 99), November 1-3, 1999, Albuquerque, NM, USA, Proceedings. pages 46-54, IEEE Computer Society, 1999. [doi]

Abstract

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