Dong-Hyun Roh, Tae-Eog Lee. Analysis and control of wafer delays in a dual-armed cluster tool for a K-cyclic schedule. In 2016 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2016, Budapest, Hungary, October 9-12, 2016. pages 418-423, IEEE, 2016. [doi]
Abstract is missing.