Design, development, and testing of real-time feedback controllers for semiconductor etching processes using in situ spectroscopic ellipsometry sensing - researchr publication

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I. G. Rosen, Tyler Parent, Baris Fidan, Chunming Wang, Anupam Madhukar. Design, development, and testing of real-time feedback controllers for semiconductor etching processes using in situ spectroscopic ellipsometry sensing. IEEE Trans. Contr. Sys. Techn., 10(1):64-75, 2002. [doi]

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