Elemental characterisation of sub 20 nm structures in devices using new SEM-EDS technology

J. T. Sagar, S. R. Burgess, C. McCarthy, X. Li. Elemental characterisation of sub 20 nm structures in devices using new SEM-EDS technology. Microelectronics Reliability, 64:367-369, 2016. [doi]

Abstract

Abstract is missing.