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Design and development of MEMS-based structures for in-situ characterization of thermo-mechanical behaviour of thin metal films

F. Saghaeian, J. Keckes, K. A. Schreiber, T. Mittereder. Design and development of MEMS-based structures for in-situ characterization of thermo-mechanical behaviour of thin metal films. Microelectronics Reliability, 88:829-834, 2018. [doi]

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