Stitch-avoiding Global Routing for Multiple E-Beam Lithography

Kritanta Saha, Sudipta Paul 0001, Pritha Banerjee, Susmita Sur-Kolay. Stitch-avoiding Global Routing for Multiple E-Beam Lithography. In 35th International Conference on VLSI Design and 2022 21st International Conference on Embedded Systems, VLSID 2022, Bangalore, India, February 26 - March 2, 2022. pages 138-143, IEEE, 2022. [doi]

Abstract

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