A MEMS resonant magnetometer based on capacitive detection

Mohamed Hadj Said, Fares Tounsi, Mohamed Masmoudi, Petros Gkotsis, Laurent A. Francis. A MEMS resonant magnetometer based on capacitive detection. In 10th International Multi-Conferences on Systems, Signals & Devices, SSD 2013, Hammamet, Tunisia, March 18-21, 2013. pages 1-5, IEEE, 2013. [doi]

Abstract

Abstract is missing.