Emerging Non-Volatile Memory and Thin-Film Transistor Technologies for Future 3D-LSI

Masumi Saitoh, Shosuke Fujii, Minoru Oda, Marina Yamaguchi, Shoichi Kabuyanagi, Yoko Yoshimura, Kensuke Ota, Kiwamu Sakuma, Yuuichi Kamimuta. Emerging Non-Volatile Memory and Thin-Film Transistor Technologies for Future 3D-LSI. In 48th European Solid-State Device Research Conference, ESSDERC 2018, Dresden, Germany, September 3-6, 2018. pages 138-141, IEEE, 2018. [doi]

Abstract

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