Three Dimensional Silicon Optical Waveguide Structure Bent by Ion Implantation for Surface Coupling

Youichi Sakakibara, Yuki Atsumi, T. Yoshida. Three Dimensional Silicon Optical Waveguide Structure Bent by Ion Implantation for Surface Coupling. In Optical Fiber Communications Conference and Exposition, OFC 2018, San Diego, CA, USA, March 11-15, 2018. pages 1-3, IEEE, 2018. [doi]

Abstract

Abstract is missing.