Haisheng San, Xiaoshan Zheng, Zhiwen Zhao, Gang Li, Xuyuan Chen. Investigation of charge relaxation of dielectrics for capacitive micro-actuators. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 1-4, IEEE, 2010. [doi]
Abstract is missing.