Rudolf Schlangen, Peter Sadewater, Uwe Kerst, Christian Boit. Contact to contacts or silicide by use of backside FIB circuit edit allowing to approach every active circuit node. Microelectronics Reliability, 46(9-11):1498-1503, 2006. [doi]
@article{SchlangenSKB06,
title = {Contact to contacts or silicide by use of backside FIB circuit edit allowing to approach every active circuit node},
author = {Rudolf Schlangen and Peter Sadewater and Uwe Kerst and Christian Boit},
year = {2006},
doi = {10.1016/j.microrel.2006.07.025},
url = {http://dx.doi.org/10.1016/j.microrel.2006.07.025},
tags = {systematic-approach},
researchr = {https://researchr.org/publication/SchlangenSKB06},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {46},
number = {9-11},
pages = {1498-1503},
}