Stefan Schrunner, Anna Jenul, Michael Scheiber, Anja Zernig, Andre Kästner, Roman Kern. A Health Factor for Process Patterns Enhancing Semiconductor Manufacturing by Pattern Recognition in Analog Wafermaps. In 2019 IEEE International Conference on Systems, Man and Cybernetics, SMC 2019, Bari, Italy, October 6-9, 2019. pages 3555-3560, IEEE, 2019. [doi]
Abstract is missing.