Statistical modelling of the variation in advanced process technologies using a multi-level partitioned response

Santosh Shedabale, Hiran Ramakrishnan, Gordon Russell, Alexandre Yakovlev, S. Chattopadhyay. Statistical modelling of the variation in advanced process technologies using a multi-level partitioned response. IET Circuits, Devices & Systems, 2(5):451-464, 2008. [doi]

Abstract

Abstract is missing.