Sheng-Chih Shen, Shyang-Jye Chang, Cheng-Tang Pan, J. C. Huang, P. C. Tsai. Design and fabrication of a multi-degree-of-freedom microactuator using symmetric piezoelectric pusher element and its applications. In IEEE/SICE International Symposium on System Integration, SII 2012, Fukuoka, Japan, December 16-18, 2012. pages 686-691, IEEE, 2012. [doi]
Abstract is missing.