Changzhi Shi, Xiaowei Liu, Rongyan Chuai. DC electrical trimming characteristics of polysilicon nanofilms with different doping concentrations. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 686-689, IEEE, 2009. [doi]
Abstract is missing.