Electrical performance stability characterization of high-sensitivity Si-based EUV photodiodes in a harsh industrial application

L. Shi, Stoyan N. Nihtianov, F. Scholze, Lis K. Nanver. Electrical performance stability characterization of high-sensitivity Si-based EUV photodiodes in a harsh industrial application. In 38th Annual Conference on IEEE Industrial Electronics Society, IECON 2012, Montreal, QC, Canada, October 25-28, 2012. pages 3952-3957, IEEE, 2012. [doi]

@inproceedings{ShiNSN12,
  title = {Electrical performance stability characterization of high-sensitivity Si-based EUV photodiodes in a harsh industrial application},
  author = {L. Shi and Stoyan N. Nihtianov and F. Scholze and Lis K. Nanver},
  year = {2012},
  doi = {10.1109/IECON.2012.6389260},
  url = {https://doi.org/10.1109/IECON.2012.6389260},
  researchr = {https://researchr.org/publication/ShiNSN12},
  cites = {0},
  citedby = {0},
  pages = {3952-3957},
  booktitle = {38th Annual Conference on IEEE Industrial Electronics Society, IECON 2012, Montreal, QC, Canada, October 25-28, 2012},
  publisher = {IEEE},
  isbn = {978-1-4673-2419-9},
}