The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures

Lin Shu, Bin Peng, Chuan Li, Dongdong Gong, Zhengbing Yang, Xingzhao Liu, Wanli Zhang. The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures. Sensors, 16(4):526, 2016. [doi]

Abstract

Abstract is missing.