Monolithic 3D integration: a path from concept to reality

Max M. Shulaker, Tony F. Wu, Mohamed M. Sabry, Hai Wei, H.-S. Philip Wong, Subhasish Mitra. Monolithic 3D integration: a path from concept to reality. In Wolfgang Nebel, David Atienza, editors, Proceedings of the 2015 Design, Automation & Test in Europe Conference & Exhibition, DATE 2015, Grenoble, France, March 9-13, 2015. pages 1197-1202, ACM, 2015. [doi]

Abstract

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