Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe

Daniel Smale, Steve Haley, Joel Segal, Ronaldo Ronaldo, Svetan M. Ratchev, Richard K. Leach, James D. Claverley. Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe. In Svetan M. Ratchev, editor, Precision Assembly Technologies and Systems, 5th IFIP WG 5.5 International Precision Assembly Seminar, IPAS 2010, Chamonix, France, February 14-17, 2010. Proceedings. Volume 315 of IFIP, pages 105-112, Springer, 2010. [doi]

Abstract

Abstract is missing.