Fabrication of high performance AlGaN/GaN FinFET by utilizing anisotropic wet etching in TMAH solution

Dong-Hyeok Son, Young-woo Jo, Ryun-Hwi Kim, Chan Heo, Jae Hwa Seo, Jin-Su Kim, In Man Kang, Sorin Cristoloveanu, Jung Hee Lee. Fabrication of high performance AlGaN/GaN FinFET by utilizing anisotropic wet etching in TMAH solution. In 45th European Solid State Device Research Conference, ESSDERC 2015, Graz, Austria, September 14-18, 2015. pages 130-133, IEEE, 2015. [doi]

Abstract

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