Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables

Fazhi Song, Yang Liu 0075, Jianxin Xu 0001, Xiaofeng Yang, Qiao Zhu. Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables. IEEE Transactions on Industrial Electronics, 66(4):3106-3116, 2019. [doi]

Abstract

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