NBTI in Si0.5Ge0.5 RMG gate stacks - Effect of high-k nitridation

P. Srinivasan, J. Fronheiser, S. Siddiqui, A. Kerber, L. F. Edge, S. Siddiqui, R. G. Southwick, E. Cartier. NBTI in Si0.5Ge0.5 RMG gate stacks - Effect of high-k nitridation. In IEEE International Reliability Physics Symposium, IRPS 2015, Monterey, CA, USA, April 19-23, 2015. pages 2, IEEE, 2015. [doi]

@inproceedings{SrinivasanFSKES15,
  title = {NBTI in Si0.5Ge0.5 RMG gate stacks - Effect of high-k nitridation},
  author = {P. Srinivasan and J. Fronheiser and S. Siddiqui and A. Kerber and L. F. Edge and S. Siddiqui and R. G. Southwick and E. Cartier},
  year = {2015},
  doi = {10.1109/IRPS.2015.7112695},
  url = {http://dx.doi.org/10.1109/IRPS.2015.7112695},
  researchr = {https://researchr.org/publication/SrinivasanFSKES15},
  cites = {0},
  citedby = {0},
  pages = {2},
  booktitle = {IEEE International Reliability Physics Symposium, IRPS 2015, Monterey, CA, USA, April 19-23, 2015},
  publisher = {IEEE},
  isbn = {978-1-4673-7362-3},
}