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An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements

Johannes Stegner, Sebastian Gropp, Dmitry Podoskin, Uwe Stehr, Martin Hoffmann, Matthias A. Hein. An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements. Sensors, 18(7):2159, 2018. [doi]

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