Fully Programmable MEMS Ciliary Actuator Arrays for Micromanipulation Tasks

John W. Suh, R. Bruce Darling, Karl-Friedrich Böhringer, Bruce Randall Donald, Henry Baltes, Gregory T. A. Kovacs. Fully Programmable MEMS Ciliary Actuator Arrays for Micromanipulation Tasks. In Proceedings of the 2000 IEEE International Conference on Robotics and Automation, ICRA 2000, April 24-28, 2000, San Francisco, CA, USA. pages 1101-1108, IEEE, 2000.

Abstract

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